Attenuator based vector network analyser calibration for on-wafer measurements

We propose a method to determine the reference impedance of the TRA calibration technique for vector network analysers. This method was developed within the framework of our activity on traceability of on-wafer S parameters measurements. Starting from a modified TRA calibration procedure, we demonstrate the possibility to determine the calibration reference impedance, and leading to a significant reduction of the measurement uncertainties. In comparison with results obtained using the reference multiline TRL calibration technique, the results that we obtain show the efficiency of the present method.