Abstract

A method for determining the electromagnetic properties of Lead Zirconate Titanate (PZT) thin films is presented in this paper. At first we introduce a broadband characterization method based on the extraction of the intrinsic properties of substrate supporting a coplanar waveguide and then we perform an accurate on-wafer TRL calibration technique to measure the permittivity of the PZT thin film embedded in a coplanar waveguide.

Key words

S parameters
coplanar waveguide
PZT
permittivity
loss tangent
ferroelectric